Tungsten(4+) tetrafluoride, Tungsten tetrafluoride
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|Molar mass||259.8336128 g/mol|
|Appearance||Red-Brown or Black Solid|
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
Tungsten tetrafluoride is an inorganic compound with the formula WF4. This little studied solid has been invoked, together with tungsten pentafluoride, as an intermediate in the chemical vapor deposition of tungsten films using tungsten hexafluoride.
The compound can be re-oxidized to W(VI) compounds by treatment with fluorine and chlorine: